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High Rate Multi Pixel Detectors
Systems utilizing multiple electron beams are an emerging semiconductor metrology technology that aims to increase throughput. El-Mul is a pioneer in developing detection solutions for such metrology systems and has designed and manufactured prototype detectors that can simultaneously detect >100 beams at 35MHz.
The detectors integrate a solid state, multi-pixel sensor, a multi-pixel feedthrough and two-stage amplifying electronics. Performance tests show a very low cross-talk between pixels (<1%). SNR is shot-noise limited when using a 5nA beam.
High Rate Multi Pixel Detectors
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