SID4 UV HR
Based on Phasics' patented technology, the SID4 UV HR wavefront sensor offers both an unrivalled high resolution (512 x 512 measurement points) and a very high sensitivity (2 nm RMS) in the ultraviolet spectrum from 190 nm to 400 nm. Consequently, the SID4 UV HR is perfectly adapted for optical component characterization (used in lithography, semiconductors…) and surface inspection (lens and wafers).
Spectral Range UV (190 - 400 nm)
Sensitive down to 190 nm
High sensitivity – 2 nm RMS
Very high resolution (512 x 512 sampling)
SID4 UV HR
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Contact usTechnical Information
| Wavelength range | 190 - 400 nm |
| Aperture dimension | 13.3 x 13.3 mm² |
| Spatial resolution | 26 µm |
| Phase and intensity sampling | 512 x 512 |
| Resolution (Phase) | 2 nm RMS |
| Accuracy (Absolute) | 20 nm RMS |
| Acquisition rate | 10 Hz |
| Real-time processing frequency* | 3 fps (full resolution)* |
| Interface | GigE |
| Dimensions (WxHxL) | 80.3 x 78.6 x 108.2 mm³ |
| Weight | ~600 g |
*with PhaseStudio software
